In the electronics industry, many processes are associated with the use of toxic, corrosive and
ozone-depleting gases: these are chlorine, arsine, phosphine, ammonia, silanes, freons and other hazardous substances. from a source (for example, a gas-cylinder cabinet), gases pass through a pipeline to the process unit, and after the process is completed, it is purged with an inert gas. waste gases are fed to the purification systems. Environmental legislation requires such emissions to be cleaned below the maximum permissible concentration.
Eltochpribor liquid scrubber works on the principle of water absorption neutralization. the gas
mixture to be purified is sprayed with a neutralizing liquid, and then passes through an adsorber, where unwanted impurities are retained. the gas purification level reaches 98-100%.